发明名称 MANUFACTURING METHOD FOR LAMINATED FILM, ELECTRO- OPTICAL DEVICE, MANUFACTURING METHOD FOR ELECTRO-OPTICAL DEVICE, MANUFACTURING METHOD FOR ORGANIC ELECTROLUMINESCENT DEVICE, AND ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method for an electro-optical device, capable of keeping chemical and physical property of material layers in desired conditions. SOLUTION: An organic electroluminescent display device 1 is formed by laminating plural layers of a low refractive index layer 3, a sealing layer 4, an anode 8, a luminous layer 5, a hole carrier layer 6, a cathode 7 and the like on a base 2. When forming the low refractive index layer 3 among those laminated layers, moist gel is dried by a supercritical drying method after being applied on the base 2.
申请公布号 JP2003133070(A) 申请公布日期 2003.05.09
申请号 JP20010332919 申请日期 2001.10.30
申请人 SEIKO EPSON CORP 发明人 MIYAZAWA TAKASHI
分类号 H05B33/10;G09F9/30;H01L27/32;H01L51/00;H01L51/30;H01L51/40;H01L51/50;H01L51/52;H01L51/56;H05B33/20;H05B33/22 主分类号 H05B33/10
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