发明名称 OPTICAL RECORDING APPARATUS AND ITS METHOD
摘要 PROBLEM TO BE SOLVED: To provide an optical recording apparatus capable of acquiring predetermined resolution even when a line width of an exposure pattern is close to a wavelength of exposed light, and reducing time necessary for exposing, and to provide its method. SOLUTION: An optical recording technique converts light from a light source to modulated light including modulation converted light and phase modulated light to cause the modulated light to form an image on an object to be exposed.
申请公布号 JP2003133201(A) 申请公布日期 2003.05.09
申请号 JP20010322598 申请日期 2001.10.19
申请人 ADVANCED LCD TECHNOLOGIES DEVELOPMENT CENTER CO LTD 发明人 TANIGUCHI YUKIO
分类号 G03F1/00;G03F7/20;H01L21/027 主分类号 G03F1/00
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