发明名称 |
OPTICAL RECORDING APPARATUS AND ITS METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide an optical recording apparatus capable of acquiring predetermined resolution even when a line width of an exposure pattern is close to a wavelength of exposed light, and reducing time necessary for exposing, and to provide its method. SOLUTION: An optical recording technique converts light from a light source to modulated light including modulation converted light and phase modulated light to cause the modulated light to form an image on an object to be exposed. |
申请公布号 |
JP2003133201(A) |
申请公布日期 |
2003.05.09 |
申请号 |
JP20010322598 |
申请日期 |
2001.10.19 |
申请人 |
ADVANCED LCD TECHNOLOGIES DEVELOPMENT CENTER CO LTD |
发明人 |
TANIGUCHI YUKIO |
分类号 |
G03F1/00;G03F7/20;H01L21/027 |
主分类号 |
G03F1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|