| 摘要 |
PROBLEM TO BE SOLVED: To provide the inspecting device/method of a semiconductor device, which can precisely position the semiconductor device with a probe card for inspection and can perform highly reliable inspection. SOLUTION: The device is provided with a stage 101 where a semiconductor wafer 102 is placed and fixed, a drive part 124 driving the stage 101 and the probe card 100 where probes 113, which are electrically connected to outer connection electrodes 105 formed on the semiconductor device 103 and obtain electrical continuity are disposed. The device is also provided with an optical waveguide part 112a, irradiating an optical reflection part 104 formed on the semiconductor device 103 with a light and a measuring part 125 measuring the intensity of reflected light 132 reflected from the optical reflection part 104. A control part 121 determining the size relation between the result of the measurement and a reference value, controlling the drive part 124, based on the result of the decision and moving the semiconductor device 103 is disposed.
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