| 摘要 |
PROBLEM TO BE SOLVED: To simplify and reduce the size of a device. SOLUTION: This wire conveying device 1 is provided with a conveying means 2 made of two wire parts 8 located in parallel in the middle of an annular wire 6 for conveyance extended so that it will not sag and moving in the opposite direction to each other, a driving means 3 for reciprocating the two wire parts 8 in the opposite direction to each other, and an elevating means 4 for alternately elevating the wire parts 8 on the side moving in the conveyance direction of a semiconductor ware 31 by individually supporting the two wire parts 8 reciprocated in the opposite direction to each other. Silicone rubber is coated on the surface of the wire parts 8. Two pieces of the wires 6 for conveyance are arranged in parallel so that their wire parts 8 are parallel to each other. An inspecting device 21 uses the wire conveying device 1 as its conveyance part. |
