| 摘要 |
<p>PROBLEM TO BE SOLVED: To solve the problem wherein exact rank sorting can not be carried out because of the simulative rank sorting due to lack in the direct rank sorting of the dimension of the single body of a ceramic substrate. SOLUTION: The dimension measuring device measures the specified distance between dividing grooves in a ceramic substrate having dividing grooves with respective V-shaped cross section. This dimension measuring device has a radiation part which irradiates light from below the ceramic substrate, at least two detection parts which are located above the ceramic substrate and deriving the transmitted light amount as an output signal, and a calculation part which calculates the central position of the dividing groove based on the output signals obtained form respective detection parts and then measures the specified distance between the dividing grooves. The single body of a ceramic substrate can directly be sorted by the dimension measuring device, so that high-precision rank sorting can be possible.</p> |
