| 摘要 |
PROBLEM TO BE SOLVED: To provide a differential exhaust seal device capable of maintaining a space sealed by a differential exhaust seal mechanism in a state before stopping, for example maintaining a clean space in a state as it is even when the differential exhaust seal mechanism stops or is stopping. SOLUTION: This differential exhaust seal device comprises the differential exhaust seal mechanism 5 for sealing a clean space region 1 as a first space and an atmosphere region 2 as a second space in a non-contact state. A seal mechanism 7 for an unsteady state for sealing a space between the clean space region 1 and the atmosphere region 2 in a contact state is provided. The seal mechanism 7 operates only when the differential exhaust seal mechanism 5 stops or is stopping and seals the clean space region 1 and the atmosphere region 2.
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