发明名称 |
Thin layer element has a covering layer having a higher conductivity in the contact regions in a direction perpendicular to a surface than in the functional regions lying in a random direction |
摘要 |
Thin layer element has a covering layer (6) having a higher conductivity in the contact regions (8) in a direction perpendicular to a surface than in the functional regions (7) lying in a random direction. Preferred Features: The specific conductivity of the covering layer is isotropic or anisotropic. The covering layer in the contact regions deviates from a value in the functional regions. The covering layer consists of a first insulating partial layer which has openings extending over its entire layer thickness, and a second insulating partial layer which has non-connected islands closing the openings in the first partial layer.
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申请公布号 |
DE10150233(A1) |
申请公布日期 |
2003.05.08 |
申请号 |
DE20011050233 |
申请日期 |
2001.10.11 |
申请人 |
SENSITEC GMBH |
发明人 |
DETTMANN, FRITZ;KAHLEN, OLAF;LOREIT, UWE |
分类号 |
G01R33/09;H01L27/22;H01L43/02;H01L43/08;H01L49/02;(IPC1-7):H01L43/08 |
主分类号 |
G01R33/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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