发明名称 |
Method and apparatus for stabilizing of the glow plasma discharges |
摘要 |
A method and apparatus for stabilizing glow plasma discharges by suppressing the transition from glow-to-arc includes a perforated dielectric plate having an upper surface and a lower surface and a plurality of holes extending therethrough. The perforated dielectric plate is positioned over the cathode. Each of the holes acts as a separate active current limiting micro-channel that prevents the overall current density from increasing above the threshold for the glow-to-arc transition. This allows for a stable glow discharge to be maintained for a wide range of operating pressures (up to atmospheric pressures) and in a wide range of electric fields include DC and RF fields of varying strength. |
申请公布号 |
US2003085656(A1) |
申请公布日期 |
2003.05.08 |
申请号 |
US20020288313 |
申请日期 |
2002.11.05 |
申请人 |
KUNHARDT ERICH;BECKER KURT |
发明人 |
KUNHARDT ERICH;BECKER KURT |
分类号 |
H01J;H01J7/24;H01J17/00;H01J17/04;H01J17/49;H01J37/32;H01J61/28;H05H1/24;H05H1/46;(IPC1-7):H01J17/00 |
主分类号 |
H01J |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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