发明名称 Phosphor coated waveguide for the efficient collection of electron-generated photons
摘要 A waveguide made of optical glass used as an detector in electron microscopy, having a beveled hole through which an electron beam passes and a phosphor coated region to detect secondary and back-scattered electrons. The photons generated by secondary and back-scattered electrons striking the phosphor coated region are directed to a photomultiplier detector mated to the waveguide by internal reflections which are further enhanced by reflective surfaces. Further, photon transmission from the waveguide to the photomultiplier is enhanced by providing a flared section at the mating end to reduce internal reflections.
申请公布号 US2003085361(A1) 申请公布日期 2003.05.08
申请号 US20010033307 申请日期 2001.11.02
申请人 APPLIED MATERIALS, INC. 发明人 HOWELLS SAMUEL C.
分类号 H01J37/244;(IPC1-7):H01J37/244 主分类号 H01J37/244
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