发明名称 Single crystal production method
摘要 The invention refers to a single crystal production method based on the Czochralski method, wherein the number of crucible rotations and the number of crystal rotations or either of two is controlled, lest the number of vibrations for driving a melt, determined on the basis of the number of crucible rotations and the number of crystal rotations during the single crystal growing procedure, should be within the range from 95 % to 105 % of the number of sloshing resonance vibrations of the melt. The invention also refers to a single crystal production method based on the Czochralski method, wherein, in case the number of vibrations for driving a melt, determined on the basis of the number of crucible rotations and the number of crystal rotations during the single crystal growing procedure, is within the range from 95 % to 105 % of the number of sloshing resonance vibrations of the melt, the number of crucible rotations and the number of crystal rotations or either of them is controlled, lest the number of vibrations of the melt due to sloshing should exceed 2000 times during the period when the number of vibrations is within said range. <IMAGE>
申请公布号 EP1308543(A1) 申请公布日期 2003.05.07
申请号 EP20020023068 申请日期 2002.10.17
申请人 WACKER SILTRONIC AG 发明人 KISHIDA, YUTAKA;TAMAKI, TERUYUKI;TAKEBAYASHI, SEIKI;OHASHI, WATARU
分类号 C30B29/06;C30B15/00;C30B15/20;C30B15/30 主分类号 C30B29/06
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