发明名称 Method and apparatus for remotely testing semiconductors
摘要 <p>An apparatus is disclosed for remotely monitoring and developing steps in a semiconductor manufacturing process that includes, at least one remote workstation connected via a remote access link to a local workstation, and a test system connected via a link to the local workstation. A method is also disclosed that includes running a semiconductor test system remotely, monitoring the semiconductor test system remotely, and receiving data from the semiconductor test system remotely. Another embodiment includes an apparatus for remotely monitoring and developing steps in a semiconductor manufacturing process. This embodiment includes a plurality of remote workstations each connected via a remote access link to a local workstation, and a test system connected via a link to a local workstation. Security features in this embodiment prevent any one remote workstation from accessing any other remote workstation. &lt;IMAGE&gt;</p>
申请公布号 EP1306679(A1) 申请公布日期 2003.05.02
申请号 EP20010204103 申请日期 2001.10.29
申请人 SCHLUMBERGER TECHNOLOGIES, INC. 发明人 CRIST, FREDRICK W.;WAGNER, TIMOTHY J.
分类号 G01R19/25;G01R31/316;G01R31/317;(IPC1-7):G01R19/25;H01L21/66 主分类号 G01R19/25
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