发明名称 |
METHOD FOR FORMING A MICRO-PATTERN ON A SUBSTRATE BY USING CAPILLARY FORCE |
摘要 |
In a method for forming a micro-pattern on a substrate by employing a mold having a predetermined pattern structure, a mold having a predetermined pattern structure containing a recessed portion and a protruded portion is prepared. A polymer material is deposited on the substrate. Then the protruded portion of the mold is controlled to be in contact with the polymer material and the polymer material in contact with the protruded portion of the mold is incorporated into an empty space of the recessed portion thereof by using capillary force thereof, thereby removing the polymer material in contact with the protruded portion of the mold. Thereafter, a portion of the top surface of the substrate is exposed by detaching the mold to thereby form a polymer micro-pattern on the substrate. |
申请公布号 |
WO03035932(A1) |
申请公布日期 |
2003.05.01 |
申请号 |
WO2001KR01599 |
申请日期 |
2001.09.25 |
申请人 |
MINUTA TECHNOLOGY CO., LTD. |
发明人 |
LEE, HONG HIE;SUH, KAB YANG;KIM, YOUN SANG;YOO, PIL JIN |
分类号 |
C23C18/16;B44C1/22;B81C1/00;C23C18/18;C23C26/00;C23C28/00;G03F7/00;H01L21/027;H01L21/3205;H01L21/3213 |
主分类号 |
C23C18/16 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|