| 摘要 |
PURPOSE: A chemical control system of semiconductor device fabrication equipment is provided to prevent the oversupply of chemicals and the malfunction of the semiconductor device fabrication equipment by automatically controlling the supply of chemicals. CONSTITUTION: A chemical control system of a semiconductor device fabrication equipment is provided with a main equipment(200), a field in/out panel(202), a data concentrator(204), a chemical supply part(206), a hub(208), a chemical supply pipe(210), a monitoring server(212), and a provision counting/controlling part(300). The field in/out panel(202) transmits chemical demand signal generated from the main equipment(200) to the data concentrator(204) through an ether-net line connected to a communication port. The data concentrator(204) selects controllable sequential control program according to the chemical demand signal transmitted from the field in/out panel(202) and transmits an input data to the monitoring server(212) through the hub(208). The monitoring server(212) carries out a control for using quantitatively chemical and check program for the supply of chemicals corresponding to the received data. That is, the supply of the chemicals toward the main equipment(200) is capable of being controlled according to chemical usage data measured in the provision counting/controlling part(300).
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