SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE: A semiconductor manufacturing apparatus is provided to prevent polymers from repeatedly falling on the surface of a wafer by installing a polymer falling prevention panel having a plurality of through-holes. CONSTITUTION: A wafer chuck(110) is located in a chamber(100) for supporting a wafer(105). A pumping port(150) is located at the upper portion of the wafer chuck(110) for vacuumizing the inner space of the chamber(100). The pumping port(150) is provided with an exhaust line(120) for exhausting the air of the chamber(100), a housing(130) for enclosing the exhaust line(120) and a polymer falling prevention panel(125). Preferably, the polymer falling prevention panel(125) having a plurality of through-holes(125a) is shaped into a disc-type for being inserted and fixed in the exhaust line(120).