发明名称 Semiconductor device and method for forming the same
摘要 A novel structure of TFT is described. In the structure of TFT, an anodic oxidation film, which is a material composing a gate electrode, is laid at the side of gate electrode. An electrode, which is connected to a source, drain region, is in contact with the upper surface and the side of the source, drain region, and extended on the upper surface of an insulation film which is laid on the gate electrode. In the preparation process of TFF, it can be completed by using only two sheets of mask.
申请公布号 US6555843(B1) 申请公布日期 2003.04.29
申请号 US19960658630 申请日期 1996.06.05
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;HAMATANI TOSHIJI
分类号 H01L29/78;H01L21/336;H01L21/77;H01L21/84;H01L29/417;H01L29/423;H01L29/49;H01L29/786;(IPC1-7):H01L29/72 主分类号 H01L29/78
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