| 摘要 |
PROBLEM TO BE SOLVED: To provide a production method for piezoelectric resonant component by which a number of processes required for partial polarizing processing and formation of various kinds of electrodes can be reduced and desired characteristics can be surely obtained. SOLUTION: When producing a piezoelectric resonant component in which energy confinement type piezoelectric vibration parts 3 and 4 utilizing a thickness longitudinal vibration mode and a capacitor part with a capacitive electrode 14 and a third conductive film 4 opposited to each other through a piezoelectric substrate 1 are configured on the same piezoelectric substrate 1, in this production method for piezoelectric resonant component, a first conductive film is formed over all an upper face 1a of the piezoelectric substrate 1, a second conductive film and the third conductive film 4 are formed on a lower face 1b of the piezoelectric substrate 1, the piezoelectric substrate 1 is polarized by applying a DC electric field between the first and second conductive films, and a portion where the third conductive film 4 is formed, is not yet polarized.Next, by patterning the first and second conductive films, various kinds of electrodes are formed and finally, the third conductive film 4 and a connecting electrode 18 formed in the not yet polarized area are electrically connected.
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