| 摘要 |
A microelectronic or nanoelectronic component including an energy source formed on a substrate (2) incorporates a sealed cavity (9) in which are arranged the parts of the components that are to be protected, these being at least the energy sources (4-7) made up of a microbattery or a microsupercapacitor. A microelectronic or nanoelectronic component including an energy source formed on a substrate (2) incorporates a sealed cavity (9) in which are arranged the parts of the components that are to be protected, these being at least the energy sources (4-7) made up of a microbattery or a microsupercapacitor. The cavity may be under vacuum or filled with an inert gas. A pressure sensor may be arranged inside the cavity and detects a variation in the pressure inside the cavity in order to render the components unusable when the pressure variation passes a predetermined threshold. The cavity may be closed by a cover (10) or filled with a filler material made up of silicon resin, thermohardening resin, polymer, epoxy, fusible glass or by a metal such as indium, tin, lead or their alloys.
|
