发明名称 |
PIEZOELECTRIC ELEMENT, DEVICE AND METHOD FOR FORMING PIEZOELECTRIC THIN FILM, INK JET HEAD USING THE SAME, AND PRESSURE SENSOR |
摘要 |
<p>PROBLEM TO BE SOLVED: To enable size reduction by increasing a piezoelectric constant as to a piezoelectric element, a device and method for forming a piezoelectric thin film, an ink jet head using it, and a pressure sensor. SOLUTION: A piezoelectric body 3B has electrodes on both its top and reverse surfaces and is formed of a Perovskite oxide thin film consisting principally of lead (Pb), zirconia (Zr), and titanium (Ti).</p> |
申请公布号 |
JP2003124536(A) |
申请公布日期 |
2003.04.25 |
申请号 |
JP20010314883 |
申请日期 |
2001.10.12 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
KOMAKI KAZUKI;MURASHIMA YUJI;NOMURA KOJI |
分类号 |
B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/16;C23C14/34;G01L9/08;H01L41/08;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/316 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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