Stereo high speed micro system diagnostic system has spectrally separated systems

摘要

A stereo high speed micro system diagnostic system has two high speed cameras (5, 6) and different illumination (2, 3) systems in different directions with magnifying optics (1) coupled through spectral filters separating the illuminations. Includes an INDEPENDENT CLAIM for the positioning of two objects in the field of view using separate micro positioners (7).