发明名称 WORK GRINDING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a grinding apparatus for improving support accuracy in grinding work by adjusting bearing power in the work axis direction according to a thickness change in a work. SOLUTION: A device grinds work both surfaces while supporting both surfaces of the plate-like work in a noncontact state by a pair of hydrostatic pressure means. This work grinding attachment is provided with a static pressure adjusting mechanism for adjusting static pressure for supporting the work by the hydrostatic pressure means in response to thickness reduction in the work.
申请公布号 JP2003117785(A) 申请公布日期 2003.04.23
申请号 JP20010315556 申请日期 2001.10.12
申请人 SUMITOMO HEAVY IND LTD 发明人 TSUKAHARA SHINICHIRO;ISOBE AKIRA;TOMITA YOSHIYUKI;IWASE AKIO;HARA KAZUTAKA;NAGATA HIROSHI
分类号 B24B7/17;B24B41/06;H01L21/304;(IPC1-7):B24B7/17 主分类号 B24B7/17
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