发明名称 |
WORK GRINDING APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a grinding apparatus for improving support accuracy in grinding work by adjusting bearing power in the work axis direction according to a thickness change in a work. SOLUTION: A device grinds work both surfaces while supporting both surfaces of the plate-like work in a noncontact state by a pair of hydrostatic pressure means. This work grinding attachment is provided with a static pressure adjusting mechanism for adjusting static pressure for supporting the work by the hydrostatic pressure means in response to thickness reduction in the work.
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申请公布号 |
JP2003117785(A) |
申请公布日期 |
2003.04.23 |
申请号 |
JP20010315556 |
申请日期 |
2001.10.12 |
申请人 |
SUMITOMO HEAVY IND LTD |
发明人 |
TSUKAHARA SHINICHIRO;ISOBE AKIRA;TOMITA YOSHIYUKI;IWASE AKIO;HARA KAZUTAKA;NAGATA HIROSHI |
分类号 |
B24B7/17;B24B41/06;H01L21/304;(IPC1-7):B24B7/17 |
主分类号 |
B24B7/17 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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