发明名称 SEMICONDUCTOR PRESSURE DETECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor pressure detection device capable of further correctly detecting pressure by preventing degradation of sealing performance of a sealing member. SOLUTION: A parylene coating 23 is formed on a surface of a sealing member 20 on the side in contact with silicone oil 18. Thereby, the silicone oil 18 can be prevented from permeating into the sealing member 20 by the parylene coating 23, so that the sealing performance of the sealing member 20 is prevented from being degraded by swelling or the like of the sealing member 20. Thereby, the silicone oil 18 is prevented from leaking to the outside from a space of a contact part between a connector housing 12 and a terminal pin 19.
申请公布号 JP2003121284(A) 申请公布日期 2003.04.23
申请号 JP20010311802 申请日期 2001.10.09
申请人 TOYODA MACH WORKS LTD 发明人 YAMAKAWA TOMOYA
分类号 G01L19/06;G01L9/00;(IPC1-7):G01L19/06 主分类号 G01L19/06
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