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发明名称
INJECTION SEEDED F 2? LITHOGRAPHY LASER
摘要
申请公布号
EP1303892(A1)
申请公布日期
2003.04.23
申请号
EP20000991859
申请日期
2000.11.28
申请人
CYMER, INC.
发明人
ONKELS, ECKEHARD, D.;DAS, PALASH, P.;DUFFEY, THOMAS, P.;SANDSTROM, RICHARD, L.;ERSHOV, ALEXANDER, I.;PARTLO, WILLIAM, N.
分类号
G03F7/20;H01L21/027;H01S3/036;H01S3/038;H01S3/097;H01S3/134;H01S3/225;H01S3/23;(IPC1-7):H01S3/00;H01S3/22;H01S3/03
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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