| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin cup washing device capable of carrying out a sufficient washing using a washing liquid without deassembling a spin cup. SOLUTION: The spin cup 12 is provided with a rotation plate 14 integrally and rotatably fixed to an upper end of a rotation shaft 13 and a chuck part 14a is formed at a center of an upper surface of the rotation plate 14. An outer periphery ring 15 is provided at a position surrounding a glass base plate suctioned and retained to the chuck part 14a on the rotation plate 14 and a plurality of slits 16 are formed between a base end and the rotation plate 14 on the outer periphery ring 15. The spin cup washing device 22 is provided with a first washing nozzle 26 for delivering the washing liquid toward an inner surface of a bottom part of the spin cup 12 and a second washing nozzle 27 for delivering the washing liquid toward an inner surface 15a of the outer periphery ring 15. Both washing nozzles 26, 27 are constituted so as to be movable to a washing position disposed above the spin cup 12 and to a retreating position where an opening/closing of an inner lid 18 and an outer lid 19 covering the spin cup 12 is not obstructed.
|
