OPTICAL BODY OF SYNTHETIC QUARTZ GLASS AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a synthetic quartz glass excellent in UV transmittance and uniformity in refractive index. SOLUTION: The synthetic quartz glass has <10 ppm concentration of OH groups, <=10 ppm concentration of chlorine, <=10 ppm concentration of fluorine and a refractive index variation (Δn) of <=1×10<-6> in a plane perpendicular to incident light and does not substantially contain an oxygen deficiency type defect.