POLARIZED LIGHT SEPARATION FILM AND POLARIZED LIGHT SEPARATION PRISM

摘要

PROBLEM TO BE SOLVED: To prevent the occurrence of cracks in a polarized light separation film when the polarized light separation film to separate P-polarized light from S-polarized light is formed on a silicon oxide glass substrate. SOLUTION: The polarized light separation film is formed on the joining face of a substrate consisting of silicon oxide glass. The polarized light separation film is obtained by depositing a high refractive index material and a low refractive index material to form an optical multilayer film and then depositing a SiO2 layer as the last layer to >=200 nm physical film thickness on the optical multilayer film or/and forming a SiO2 layer as the first layer to >=200 nm physical film thickness in the substrate side under the optical multilayer film so as to prevent the occurrence of cracks.