APPARATUS FOR PREVENTING CONDENSATION OF GAS INLET PIPE USING HEATED COOLING WATER OF PLASMA DEPOSITION EQUIPMENT

摘要

PURPOSE: An apparatus for preventing condensation of gas inlet pipe using heated cooling water of plasma deposition equipment is provided to prevent condensation of process gas flown into the gas inlet pipe by heating the gas inlet pipe to a certain temperature using cooling water remained after cooling the process chamber. CONSTITUTION: In a plasma deposition equipment comprising upper and lower electrodes(102,103) that are fixed to the inner part of a process chamber(101); an unwinder(105) installed at one side of the process chamber to supply a sheet type material(104) between the upper and lower electrodes; a winder(107) installed at the other side of the process chamber to wind a corrosion resistant film adhered material passing through space between the upper and lower electrodes; a cooler(115) installed at the upper side of the process chamber to supply cooling water into a cooling jacket for covering the process chamber; and a storage vessel(111) installed at the lower side of the process chamber to store a corrosion resistant raw material in the liquid state that is supplied into the process chamber through a gas inlet pipe(112), the apparatus for preventing condensation of the gas inlet pipe using heated cooling water of the plasma deposition equipment comprises a heater(117) for heating by recovering hot water having a certain temperature after cooling the process chamber from the cooling jacket; and an outer pipe for supplying high temperature water(118) installed to cover the outer circumferential surface of the gas inlet pipe so that the gas inlet pipe is maintained to a certain temperature as high temperature water heated in the heater is passing through the outer circumferential surface of the gas inlet pipe.