| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact multi-degree-of-freedom oscillation wave driver. SOLUTION: The oscillation wave driver comprises an oscillator where a piezoelectric element 2 is bonded to one side of a ring-like resilient body 1 having the other side provided with protrusions 3 formed at an interval of 90 deg.C. Three-wave in-plane oscillation and two-wave out-plane oscillation relative to the resilient body 1 are formed in the piezoelectric element 2 such that one- side opposite protrusions 3 become the antinode position of oscillation, one or the other in-plane oscillation is combined with the out-plane oscillation and the in-plane oscillations are combined in two directions so that a spherical mover pressed by these protrusions 3 can be driven in the tri-axial direction. |
