发明名称 CLOSED LOOP-CONTROLLING APPARATUS, OPTICAL ELEMENT- DRIVING APPARATUS, AND ALIGNER
摘要 PROBLEM TO BE SOLVED: To speedily, accurately, and stably drive a control target by accurately detecting an AC gain for correction. SOLUTION: The closed loop-controlling apparatus comprises a signal generator 210 that includes a sensor 40 for detecting the amount of control from a control valve 20 for controlling the pressure or the flow rate of fluid, has a closed loop control means for performing the closed loop control of the control target, and generates a specific frequency, a signal adder 60 for adding an output signal from the signal generator 210 to the closed loop control means, and a signal detection section 220 for detecting a frequency component that is included in a signal in the closed loop control means and is the same as the output signal from the signal generator 210, thus detecting a signal that is correlated to the gain of the closed loop control means by the signal detection section 220.
申请公布号 JP2003115447(A) 申请公布日期 2003.04.18
申请号 JP20010309781 申请日期 2001.10.05
申请人 CANON INC 发明人 OKADA YOSHIYUKI
分类号 G02B7/08;G03F7/20;H01L21/027;(IPC1-7):H01L21/027 主分类号 G02B7/08
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