发明名称 METHOD OF MANUFACTURING NEAR-FIELD LIGHT GENERATION ELEMENT
摘要 PROBLEM TO BE SOLVED: To solve the problem that although a conventional near-field light generation element comprising a very small scatterer can enhance a resolution and can increase the intensity of light obtained by a detector, the manufacture of the generation element requires a high-cost manufacturing apparatus, that the generation element cannot be mass-produced and that the low cost of an SNOM device or an optical memory device is difficult. SOLUTION: In the method of manufacturing the near-field light generation element, the very small scatterer used to generate a plasmon when light is irradiated is formed at the inside of an opening. The method comprises a very-small-scatterer formation process 101 in which the very small scatterer is formed on the surface of a light propagator, a very-small-scatterer mask-part formation process 102 wherein a material whose refractive index is lower than the refractive index of the light propagator is brought into contact with the light propagator and a very-small-scatterer mask part is formed by an exposure luminous flux satisfying a total reflection condition in the interface between the light propagator and the low-refractive-index material and an opening formation process 103 in which the opening is formed in such a way that the very small scatterer is arranged at the inside of the opening by using the very-small-scatter mask part.
申请公布号 JP2003114183(A) 申请公布日期 2003.04.18
申请号 JP20010308564 申请日期 2001.10.04
申请人 SEIKO INSTRUMENTS INC 发明人 KASAMA NOBUYUKI;OMI MANABU;MITSUOKA YASUYUKI;MAEDA HIDETAKA;KATO KENJI;ARAWA TAKASHI;SHINOHARA YOKO
分类号 G01Q60/22;G01Q70/14;(IPC1-7):G01N13/14 主分类号 G01Q60/22
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