| 摘要 |
PURPOSE: A fluid material filling apparatus and a filling method are provided to sufficiently fill a closed-end hole with a fluid material, and especially supply the fluid material deeply into the bottom of respective holes formed in a substrate. CONSTITUTION: A filling apparatus comprises a scavenging section for forming a first hermetically closed chamber(5) when brought into contact with a substrate surface and for depressurizing the first hermetically closed chamber, a fluid material filling section for forming a second hermetically closed chamber(9) when brought into contact with the substrate surface and for stuffing the fluid material into the hole(21) of the substrate within the second hermetically closed chamber, and shifting unit(14) for shifting the second hermetically closed chamber of the fluid material filling section to a position of the hole of the substrate after the hole of the substrate is depressurized in the first hermetically closed chamber of the scavenging section. The second hermetically closed chamber is provided adjacent to the first hermetically closed chamber. The fluid material filling section comprises a supply section for supplying the fluid material onto a substrate surface within the second hermetically closed chamber and a squeezing unit for pushing the fluid material into the hole of the substrate within the second hermetically closed chamber.
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