SEMICONDUCTOR PRODUCTION SYSTEM AND METHOD OF SIMULATING PRODUCTION OF SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor production system and a method of simulating the production of a semiconductor that can flexibly cope with a change in kind of products or in state of facilities. SOLUTION: A transporter T1 transporting a product PI specifies a treating device M1 that can become a transporting destination of a product PI from process information of the product 1, receives the positional information and status information transmitted from the device M1, and moves in accordance with a vector V-T1 indicating the moving direction and distance of the transporter PI itself by generating the vector V-T1 any time based on its own positional information and status information. On the other hand, when another transporter T3 not mounted with any product receives a transport request signal transmitted from a treating device M2, the transporter T3 receives the positional information and status information of the device M2 which transmits the transport request syal and moves in accordance with a vector V-T3 indicating the moving direction and distance of the transporter T3 itself by generating the vector V-T3 any time based on its own positional information and status information.