| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for recovering an organic solvent from a waste liquid containing the organic solvent, supercritical carbon dioxide (CO2 ), and an etchant contaminants. SOLUTION: In this method, the organic solvent is separated from the waste liquid comprising supercritical CO2 , the organic solvent, and the etchant contaminants. The method comprises separating the supercritical CO2 by subjecting the waste liquid to elevated temperature and/or reduced pressure, to thereby obtain a first composition containing supercritical CO2 and a second composition containing the organic solvent free of the supercritical CO2 ; and then removing non-volatile etching contaminants from the second composition, to recover the organic solvent by at least one of the following: evaporation, distillation, filtration, centrifugation and settling.</p> |
