| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspection method and a semiconductor apparatus which can inspect an LSI chip readily, rapidly and precisely by using an all-purpose, inexpensive, easy and popular LSI tester, inspect a plurality of LSI chips simultaneously, and to thereby prevent an increase in an inspection time and restrain an inspection cost. SOLUTION: An LSI chip 2 can be inspected via wiring on a dicing line 4 from an LSI test chip 3 to an LSI chip 2 by probing an LSI test chip 3 by using a probing needle 103 of an LSI tester 101 and by using the LSI tester 101.
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