Fabrication of thin layers containing micro-components involves local implantation of a gaseous species on a substrate and separating the substrate containing micro-components from the rest of the substrate

摘要

Fabrication of thin layers containing micro-components involves local implantation of a gaseous species on a substrate and separating the substrate containing micro-components from the rest of the substrate The fabrication of thin layers containing micro-components using a substrate (1) comprises, for each layer: (a) local implantation of a gaseous species in the substrate perpendicular to a plurality of implantation zones defined on the substrate surface, avoiding, by adequate selection of the depth and shape of the implantation zones, degradation of the substrate surface; (b) realization of micro-components (6) in the substrate surface layer delimited by the implantation depth; (c) separating the substrate in two parts, one containing the surface layer incorporating the micro-components and the other being the remainder of the substrate. An Independent claim is also included for a thin layer containing micro-components fabricated by this method.