发明名称 |
INFORMATION ACQUISITION APPARATUS, CROSS SECTION EVALUATING APPARATUS, AND CROSS SECTION EVALUATING METHOD |
摘要 |
The invention provides a cross section evaluating apparatus capable of analyzing the cross sectional structure in a state where the temperature of the specimen is regulated. There is disclosed an information acquisition apparatus comprising a stage for placing the specimen, temperature regulation means for regulating the temperature of the specimen, exposure means for exposing a surface, of which information is desired, of the specimen, and information acquisition means for acquiring information relating to the surface exposed by the exposure means.
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申请公布号 |
WO03032360(A1) |
申请公布日期 |
2003.04.17 |
申请号 |
WO2002JP10277 |
申请日期 |
2002.10.02 |
申请人 |
CANON KABUSHIKI KAISHA;MOTOI, TAIKO;UENO, RIE |
发明人 |
MOTOI, TAIKO;UENO, RIE |
分类号 |
H01J37/20;H01J37/28;H01J37/30;H01J37/304;(IPC1-7):H01J37/20;H01J37/317 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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