| 摘要 |
There is provided a susceptor with a built-in electrode and a manufacturing method therefor, in which there is no danger of corrosive gas or plasma or the like penetrating to the inside of the substrate, which has excellent corrosion resistance and plasma resistance, in which nonconductivity under high temperatures is improved, and in which leakage current does not occur. A susceptor with a built-in electrode 21 according to the present invention comprises: a mounting plate 22 and a support plate 23 which are formed from aluminum nitride based sintered bodies; an internal electrode 24 formed from either an aluminum nitride and tungsten composite sintered body or an aluminum nitride and molybdenum composite sintered body, which is formed between the mounting plate 22 and the support plate 23; and power supply terminals 26 which are provided in the support plate 23 and are electrically connected to the internal electrode 24, and both surfaces of the internal electrode 24 are coated with a nonconductive material 30 comprising AlN particles.
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