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发明名称
VERFAHREN ZUR HERSTELLUNG EINES DRAM-KONDENSATORS MIT GESTAPELTEN ELEKTRODEN
摘要
申请公布号
DE59709521(D1)
申请公布日期
2003.04.17
申请号
DE19975009521
申请日期
1997.09.05
申请人
INFINEON TECHNOLOGIES AG
发明人
SCHINDLER, GUENTHER;HARTNER, WALTER;MAZURE-ESPEJO, CARLOS
分类号
H01L21/8242;H01L27/108;(IPC1-7):H01L21/824
主分类号
H01L21/8242
代理机构
代理人
主权项
地址
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