Triangular combinatorial chemchip and its preparation

摘要

A triangular combinatorial chemchip and its preparation method are disclosed. Such a triangular combinatorial chemchip is a systematically arrangement of distinct defined regions formed by combinatorially sputtering with masks on the surface of a substrate. This arrangement coordinates compositions or concentrations of different species inside the chip. By using such triangular chemchips, one can quickly and efficiently screen adequate compositions and recipes of sample materials.