发明名称 |
Tunable thin film capacitor |
摘要 |
It is an object of the invention to provide a variable capacitor constituted such that, even when an external control voltage is applied, a stable dielectric constant of the dielectric layer can be obtained. A variable capacitor constituted such that a dielectric layer whose dielectric constant is changed by the application of an external voltage is held between an upper electrode layer and a lower electrode layer, wherein a plurality of capacitance-producing regions a, b are connected to each other.
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申请公布号 |
US2003071300(A1) |
申请公布日期 |
2003.04.17 |
申请号 |
US20020113776 |
申请日期 |
2002.03.28 |
申请人 |
YASHIMA YUKIHIKO;KUSABE KAZUHIRO;MISHIMA TSUNEO;KISHINO TETSUYA |
发明人 |
YASHIMA YUKIHIKO;KUSABE KAZUHIRO;MISHIMA TSUNEO;KISHINO TETSUYA |
分类号 |
H01L21/02;(IPC1-7):H01L27/108;H01L29/76;H01L29/94;H01L31/119 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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