发明名称 Tunable thin film capacitor
摘要 It is an object of the invention to provide a variable capacitor constituted such that, even when an external control voltage is applied, a stable dielectric constant of the dielectric layer can be obtained. A variable capacitor constituted such that a dielectric layer whose dielectric constant is changed by the application of an external voltage is held between an upper electrode layer and a lower electrode layer, wherein a plurality of capacitance-producing regions a, b are connected to each other.
申请公布号 US2003071300(A1) 申请公布日期 2003.04.17
申请号 US20020113776 申请日期 2002.03.28
申请人 YASHIMA YUKIHIKO;KUSABE KAZUHIRO;MISHIMA TSUNEO;KISHINO TETSUYA 发明人 YASHIMA YUKIHIKO;KUSABE KAZUHIRO;MISHIMA TSUNEO;KISHINO TETSUYA
分类号 H01L21/02;(IPC1-7):H01L27/108;H01L29/76;H01L29/94;H01L31/119 主分类号 H01L21/02
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