| 发明名称 |
Method and device for the automatic generation of images adapted to align a charged particle beam column |
| 摘要 |
<p>The invention provides a method for automatically aligning a beam of charged particles with an aperture. Thereby, a defocusing is introduced and a signal calculated based on an image shift is applied to a deflection unit. Further, a method for correction of astigmatism is provided. Thereby, the sharpness is evaluated for a set of frames generated whilst varying the signals to a stigmator.</p> |
| 申请公布号 |
EP1302971(A2) |
申请公布日期 |
2003.04.16 |
| 申请号 |
EP20020016839 |
申请日期 |
2002.07.29 |
| 申请人 |
APPLIED MATERIALS ISRAEL LTD. |
发明人 |
PEARL, ASHER |
| 分类号 |
G21G5/00;H01J37/21;A61N5/00;G01N21/00;H01J3/26;H01J37/08;H01J37/153;H01J37/22;H01J37/26;(IPC1-7):H01J37/04;H01J37/304 |
主分类号 |
G21G5/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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