发明名称 |
SYSTEM AND METHOD FOR REMOVING CONTAMINANT PARTICLES RELATIVE TO AN ION BEAM |
摘要 |
A system for inhibiting the transport of contaminant particles with an ion beam includes a particle charging system for charging particles within a region through which the ion beam travels. An electric field is generated downstream relative to the charged region so as to urge charged particles away from a direction of travel for the ion beam.
|
申请公布号 |
KR20030029897(A) |
申请公布日期 |
2003.04.16 |
申请号 |
KR20037003081 |
申请日期 |
2003.02.28 |
申请人 |
|
发明人 |
|
分类号 |
H01J27/20;H01J37/30;H01J37/02;H01J37/04;H01J37/317;H01L21/265 |
主分类号 |
H01J27/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|