| 摘要 |
PROBLEM TO BE SOLVED: To reduce unnecessary vibration bringing fading of a pattern projected on a target part of a substrate in continuously vibrational movement in a projection system. SOLUTION: The vibrational movement is attained to be measured by a detection means. The detection means generates a motion signal, a control means responds thereto, and at this time the control means generates a control signal. Preferable algorithm used for generating the control signal is based on a method referred to as H infinity. The control signal is given to a drive means. The drive means compensates vibration of a projection lens, thereby improving image formation accuracy of the pattern projected on the substrate.
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