| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator which can be smoothly started even when a vibration, an impact or the like is applied in a stopping state, and to provide a method for driving the electrostatic actuator and a camera module using the same. SOLUTION: The dispositions of a stator and a movable element are corrected in parallel by forcibly vertically vibrating the element at the time of starting, and the smooth drive can be started. The dispositions of the stator and the movable element are corrected in parallel by carrying out a holding operation for vertically vibrating the element in stop or waiting, and the smooth drive can be started. The dispositions of the stator and the movable element are maintained in a parallel state by setting to the state in which the element is sucked to the upper or lower stator in the stop or waiting state, and the smooth drive can be started.
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