发明名称 |
LEAD FRAME, SEMICONDUCTOR DEVICE AND METHOD FOR CONFIRMING MOUNTING POSITION OF SEMICONDUCTOR CHIP |
摘要 |
PROBLEM TO BE SOLVED: To facilitate alignment at the time of mounting a semiconductor chip on a lead frame, and confirmation of the mounting position in the inspection process. SOLUTION: A concrete pattern having specified shape and area is provided on the die pad 5 of a lead frame 2 as a mark 1 for confirming the position of a semiconductor chip 3. When the semiconductor chip 3 is placed while deviating from an allowable mounting range 6 in the X direction, the semiconductor chip 3 covers the mark 1 and since the shape at the observable part (shaded part) of the mark 1 is varied, positional shift in the X direction can be recognized. Positional shift in the Y direction is judged by observing an electrode 4 located between the extensions of the side 8. |
申请公布号 |
JP2003110082(A) |
申请公布日期 |
2003.04.11 |
申请号 |
JP20010299162 |
申请日期 |
2001.09.28 |
申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
KAMIBAYASHI TETSUYA;ABE SHUNICHI;IZUMI TADAO;YAMAZAKI AKIRA |
分类号 |
H01L21/52;H01L23/495;H01L23/50;H01L23/544;(IPC1-7):H01L23/50 |
主分类号 |
H01L21/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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