发明名称 METHOD OF GROWING III-V COMPOUND SEMICONDUCTOR, SEMICONDUCTOR ELEMENT, AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method of growing a crystal by which nitrogen can be mixed in crystals without being affected by the supply condition of a group III raw material and a III-V compound semiconductor containing nitrogen and a group V element other than nitrogen in a group V composition can be obtained. SOLUTION: This method of growing a III-V (N(As, P, Sb)) compound semiconductor (wherein, V (N(As, P, Sb)) means that it surely contains a N element as a group V element and at least one kind of element selected from among As, P, and Sb) includes a step of supplying a raw material which does not contain any group III element source, but the nitrogen source of the group V element.
申请公布号 JP2003109909(A) 申请公布日期 2003.04.11
申请号 JP20020056935 申请日期 2002.03.04
申请人 SHARP CORP 发明人 TAKAHASHI KOJI
分类号 H01L21/205;H01L33/06;H01L33/30;H01S5/343 主分类号 H01L21/205
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