| 摘要 |
A method for identifying an integrated circuit having a latent defect. Test data corresponding to a set of integrated circuits is obtained, where the set of integrated circuits was processed on a single substrate. A subject integrated circuit is selected for analysis from within the set of integrated circuits. A subset of integrated circuits is identified from within the set of integrated circuits, where the subset of integrated circuits includes integrated circuits that were located in close proximity on the substrate to the subject integrated circuit. The test data for the subset of integrated circuits is analyzed to determine a defect parameter for the subset of integrated circuits. The defect parameter for the subset of integrated circuits is compared to a threshold. The subject integrated circuit is classified as having a latent defect when the defect parameter for the subset of integrated circuits violates the threshold, and the subject integrated circuit is classified as not having a latent defect when the defect parameter for the subset of integrated circuits does not violate the threshold.
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