发明名称 METHOD OF PRODUCING RESIN MOLDED PRODUCT
摘要 <p>A method of producing a resin molded product comprising a resist pattern forming step in which a fist resist layer is formed on the substrate, the first resist layer is exposed by using a mask, a second resist layer is formed, the mask is aligned, the second resist layer is exposed, steps (c)-(e) are repeated a plurality of times until a desired resist thickness is formed, and then a desired resist pattern is formed after a developing step, a metal structure forming step in which a metal structure is deposited by plating on the substrate according to the resist pattern, and a molded product forming step in which a resin molded product is formed using the metal structure as a mold. Accordingly, a precision and low-cost resin molded product and a production method therefor are provided.</p>
申请公布号 WO2003028970(P1) 申请公布日期 2003.04.10
申请号 JP2002009931 申请日期 2002.09.26
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址