| 摘要 |
FIELD: acquiring data on azimuthal homogeneity of electron beams acting on object being processed. SUBSTANCE: method includes passage of part of electron beam through perforated collector electrode followed by its fixation and measurement with aid of one Faraday cup rotating inside collector electrode and made for radial displacement; all measurements of electron beam current distribution are made in vacuum. Device implementing proposed method has perforated collector electrode, Faraday cup rotating for radial displacement inside perforated collector electrode which is made in the form of ring with small-diameter through holes and is disposed so that centers of its through holes are aligned with centers of Penning cells involving local plasma formation wherefrom electrons are extracted under impact of steplessly varied accelerating voltage. EFFECT: enhanced efficiency, reduced labor consumption, simplified design and easy use of device. 2 cl, 2 dwg |
