发明名称 LCMOS DISPLAYS FABRICATED WITH IMPLANT TREATED SILICON WAFERS
摘要 <p>An improved LCMOS display device employing a silicon-on-insulator (SOI) substrate (41) having an epitaxial silicon layer (15) lying over an implant-generated dielectric layer (13). MOS device and capacitor elements (17, 19, 21) used to activate the display are formed and interconnected in the epitaxial silicon (15). The implant-generated dielectric layer (13) and underlying silicon substrate (41) also serve as capacitor elements, thereby simplifying the structure and fabrication of the display device and providing improved operation through improved isolation of the MOS device elements formed in the epitaxial silicon (15) from the substrate (41).</p>
申请公布号 WO1989002095(A1) 申请公布日期 1989.03.09
申请号 US1988002965 申请日期 1988.08.23
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