申请人 |
APPLIED MATERIALS, INC.;LAI, KEN, K.;BYUN, JEONG, SOO;WU, FREDERICK, C.;SRINIVAS, RAMANUJAPURAM, A.;GELATOS, AVGERINOS;CHANG, MEI;KORI, MORIS;SINHA, ASHOK, K.;CHUNG, HUA;FANG, HONGBIN;MAK, ALFRED, W.;YANG, MICHAEL, X.;XI, MING |
发明人 |
LAI, KEN, K.;BYUN, JEONG, SOO;WU, FREDERICK, C.;SRINIVAS, RAMANUJAPURAM, A.;GELATOS, AVGERINOS;CHANG, MEI;KORI, MORIS;SINHA, ASHOK, K.;CHUNG, HUA;FANG, HONGBIN;MAK, ALFRED, W.;YANG, MICHAEL, X.;XI, MING |